SESHA 43rd Virtual Annual Symposium
July 7, 2021
Title: Comparison of ultra-low measurement technologies for the semi-conductor community for process optimization/contamination, leak detection, and industrial hygiene using FTIR, TFS, PTR-TOF-MS Technology Strategies for halogenated and GHG
Speakers: Peter G. Zemek, Ph.D. and Steven E. Yuchs, Ph.D.
Date & Time: Wednesday, July 7, 12 – 3PM ET
Various types of sampling and analysis strategies have been developed and implemented for the identification and quantitation of trace compounds, halogenated compounds, and GHG in the semi-conductor community. Industrial hygiene, fenceline measurements and modeling, and process optimization and raw materials QA/QC will be discussed. Advantages and disadvantages of a new proton transfer reaction time of flight mass spectrometer (PTR-TOF-MS) method development and optically enhanced FTIR instrumentation will be examined. Case studies and calibration QA/QC data will be discussed that are currently in development for the field. Discussion will focus on current PTR-TOF-MS sampling and analysis techniques development, Emphasis will be placed on the case studies utilizing by OE-FTIR and PTR mass spectrometry instrumentation.